{"id":275,"date":"2025-12-10T03:46:07","date_gmt":"2025-12-10T03:46:07","guid":{"rendered":"https:\/\/www.fariplasmatech.com\/product\/icp-plasma-residue-removal-system\/"},"modified":"2026-03-17T10:41:24","modified_gmt":"2026-03-17T02:41:24","slug":"icp-plasma-residue-removal-system","status":"publish","type":"product","link":"https:\/\/www.fariplasmatech.com\/ko\/product\/icp-plasma-residue-removal-system\/","title":{"rendered":"ICP Plasma Residue Removal System"},"content":{"rendered":"","protected":false},"excerpt":{"rendered":"

The PD-200 ICP plasma residue removal system integrates a 13.56 MHz RF source (up to 2 kW) for controlled photoresist stripping and residue removal in semiconductor processes. It supports multi-wafer handling, precise temperature control up to 250\u00b0C, and uniformity \u22645% for stable production performance.<\/p>\n","protected":false},"featured_media":373,"template":"","meta":{"inline_featured_image":false},"products":[30],"class_list":["post-275","product","type-product","status-publish","has-post-thumbnail","hentry","products-semiconductor-plasma-equipment"],"yoast_head":"\nICP Plasma Residue Removal System | Fari Plasma<\/title>\n<meta name=\"description\" content=\"The PD-200 ICP plasma residue removal system delivers 2 kW RF power, 50\u2013250\u00b0C process control, and \u22645% uniformity for reliable photoresist stripping. Built for multi-wafer semiconductor production.\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.fariplasmatech.com\/ko\/product\/icp-plasma-residue-removal-system\/\" \/>\n<meta property=\"og:locale\" content=\"ko_KR\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"ICP Plasma Residue Removal System | Fari Plasma\" \/>\n<meta property=\"og:description\" content=\"The PD-200 ICP plasma residue removal system delivers 2 kW RF power, 50\u2013250\u00b0C process control, and \u22645% uniformity for reliable photoresist stripping. Built for multi-wafer semiconductor production.\" \/>\n<meta property=\"og:url\" content=\"https:\/\/www.fariplasmatech.com\/ko\/product\/icp-plasma-residue-removal-system\/\" \/>\n<meta property=\"og:site_name\" content=\"Fari Plasma\" \/>\n<meta property=\"article:modified_time\" content=\"2026-03-17T02:41:24+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/www.fariplasmatech.com\/wp-content\/uploads\/2025\/12\/20250829145147928.png\" \/>\n\t<meta property=\"og:image:width\" content=\"833\" \/>\n\t<meta property=\"og:image:height\" content=\"330\" \/>\n\t<meta property=\"og:image:type\" content=\"image\/png\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"Est. reading time\" \/>\n\t<meta name=\"twitter:data1\" content=\"1 minute\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"WebPage\",\"@id\":\"https:\/\/www.fariplasmatech.com\/ko\/product\/icp-plasma-residue-removal-system\/\",\"url\":\"https:\/\/www.fariplasmatech.com\/ko\/product\/icp-plasma-residue-removal-system\/\",\"name\":\"ICP Plasma Residue Removal System | Fari Plasma\",\"isPartOf\":{\"@id\":\"https:\/\/www.fariplasmatech.com\/ko\/#website\"},\"primaryImageOfPage\":{\"@id\":\"https:\/\/www.fariplasmatech.com\/ko\/product\/icp-plasma-residue-removal-system\/#primaryimage\"},\"image\":{\"@id\":\"https:\/\/www.fariplasmatech.com\/ko\/product\/icp-plasma-residue-removal-system\/#primaryimage\"},\"thumbnailUrl\":\"https:\/\/www.fariplasmatech.com\/ko\/wp-content\/uploads\/2025\/12\/20250829145147928.png\",\"datePublished\":\"2025-12-10T03:46:07+00:00\",\"dateModified\":\"2026-03-17T02:41:24+00:00\",\"description\":\"The PD-200 ICP plasma residue removal system delivers 2 kW RF power, 50\u2013250\u00b0C process control, and \u22645% uniformity for reliable photoresist stripping. Built for multi-wafer semiconductor production.\",\"breadcrumb\":{\"@id\":\"https:\/\/www.fariplasmatech.com\/ko\/product\/icp-plasma-residue-removal-system\/#breadcrumb\"},\"inLanguage\":\"ko_KR\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\/\/www.fariplasmatech.com\/ko\/product\/icp-plasma-residue-removal-system\/\"]}]},{\"@type\":\"ImageObject\",\"inLanguage\":\"ko_KR\",\"@id\":\"https:\/\/www.fariplasmatech.com\/ko\/product\/icp-plasma-residue-removal-system\/#primaryimage\",\"url\":\"https:\/\/www.fariplasmatech.com\/ko\/wp-content\/uploads\/2025\/12\/20250829145147928.png\",\"contentUrl\":\"https:\/\/www.fariplasmatech.com\/ko\/wp-content\/uploads\/2025\/12\/20250829145147928.png\",\"width\":833,\"height\":330},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/www.fariplasmatech.com\/ko\/product\/icp-plasma-residue-removal-system\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"Home\",\"item\":\"https:\/\/www.fariplasmatech.com\/ko\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"Products\",\"item\":\"https:\/\/www.fariplasmatech.com\/ko\/product\/\"},{\"@type\":\"ListItem\",\"position\":3,\"name\":\"ICP Plasma Residue Removal System\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\/\/www.fariplasmatech.com\/ko\/#website\",\"url\":\"https:\/\/www.fariplasmatech.com\/ko\/\",\"name\":\"Fari Plasma\",\"description\":\"\",\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/www.fariplasmatech.com\/ko\/?s={search_term_string}\"},\"query-input\":{\"@type\":\"PropertyValueSpecification\",\"valueRequired\":true,\"valueName\":\"search_term_string\"}}],\"inLanguage\":\"ko_KR\"}]}<\/script>\n<!-- \/ Yoast SEO plugin. -->","yoast_head_json":{"title":"ICP Plasma Residue Removal System | Fari Plasma","description":"The PD-200 ICP plasma residue removal system delivers 2 kW RF power, 50\u2013250\u00b0C process control, and \u22645% uniformity for reliable photoresist stripping. Built for multi-wafer semiconductor production.","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/www.fariplasmatech.com\/ko\/product\/icp-plasma-residue-removal-system\/","og_locale":"ko_KR","og_type":"article","og_title":"ICP Plasma Residue Removal System | Fari Plasma","og_description":"The PD-200 ICP plasma residue removal system delivers 2 kW RF power, 50\u2013250\u00b0C process control, and \u22645% uniformity for reliable photoresist stripping. Built for multi-wafer semiconductor production.","og_url":"https:\/\/www.fariplasmatech.com\/ko\/product\/icp-plasma-residue-removal-system\/","og_site_name":"Fari Plasma","article_modified_time":"2026-03-17T02:41:24+00:00","og_image":[{"width":833,"height":330,"url":"https:\/\/www.fariplasmatech.com\/wp-content\/uploads\/2025\/12\/20250829145147928.png","type":"image\/png"}],"twitter_card":"summary_large_image","twitter_misc":{"Est. reading time":"1 minute"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"WebPage","@id":"https:\/\/www.fariplasmatech.com\/ko\/product\/icp-plasma-residue-removal-system\/","url":"https:\/\/www.fariplasmatech.com\/ko\/product\/icp-plasma-residue-removal-system\/","name":"ICP Plasma Residue Removal System | Fari Plasma","isPartOf":{"@id":"https:\/\/www.fariplasmatech.com\/ko\/#website"},"primaryImageOfPage":{"@id":"https:\/\/www.fariplasmatech.com\/ko\/product\/icp-plasma-residue-removal-system\/#primaryimage"},"image":{"@id":"https:\/\/www.fariplasmatech.com\/ko\/product\/icp-plasma-residue-removal-system\/#primaryimage"},"thumbnailUrl":"https:\/\/www.fariplasmatech.com\/ko\/wp-content\/uploads\/2025\/12\/20250829145147928.png","datePublished":"2025-12-10T03:46:07+00:00","dateModified":"2026-03-17T02:41:24+00:00","description":"The PD-200 ICP plasma residue removal system delivers 2 kW RF power, 50\u2013250\u00b0C process control, and \u22645% uniformity for reliable photoresist stripping. Built for multi-wafer semiconductor production.","breadcrumb":{"@id":"https:\/\/www.fariplasmatech.com\/ko\/product\/icp-plasma-residue-removal-system\/#breadcrumb"},"inLanguage":"ko_KR","potentialAction":[{"@type":"ReadAction","target":["https:\/\/www.fariplasmatech.com\/ko\/product\/icp-plasma-residue-removal-system\/"]}]},{"@type":"ImageObject","inLanguage":"ko_KR","@id":"https:\/\/www.fariplasmatech.com\/ko\/product\/icp-plasma-residue-removal-system\/#primaryimage","url":"https:\/\/www.fariplasmatech.com\/ko\/wp-content\/uploads\/2025\/12\/20250829145147928.png","contentUrl":"https:\/\/www.fariplasmatech.com\/ko\/wp-content\/uploads\/2025\/12\/20250829145147928.png","width":833,"height":330},{"@type":"BreadcrumbList","@id":"https:\/\/www.fariplasmatech.com\/ko\/product\/icp-plasma-residue-removal-system\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"Home","item":"https:\/\/www.fariplasmatech.com\/ko\/"},{"@type":"ListItem","position":2,"name":"Products","item":"https:\/\/www.fariplasmatech.com\/ko\/product\/"},{"@type":"ListItem","position":3,"name":"ICP Plasma Residue Removal System"}]},{"@type":"WebSite","@id":"https:\/\/www.fariplasmatech.com\/ko\/#website","url":"https:\/\/www.fariplasmatech.com\/ko\/","name":"Fari Plasma","description":"","potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/www.fariplasmatech.com\/ko\/?s={search_term_string}"},"query-input":{"@type":"PropertyValueSpecification","valueRequired":true,"valueName":"search_term_string"}}],"inLanguage":"ko_KR"}]}},"_links":{"self":[{"href":"https:\/\/www.fariplasmatech.com\/ko\/wp-json\/wp\/v2\/product\/275","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.fariplasmatech.com\/ko\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.fariplasmatech.com\/ko\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.fariplasmatech.com\/ko\/wp-json\/wp\/v2\/media\/373"}],"wp:attachment":[{"href":"https:\/\/www.fariplasmatech.com\/ko\/wp-json\/wp\/v2\/media?parent=275"}],"wp:term":[{"taxonomy":"products","embeddable":true,"href":"https:\/\/www.fariplasmatech.com\/ko\/wp-json\/wp\/v2\/products?post=275"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}