{"id":279,"date":"2025-12-10T03:46:07","date_gmt":"2025-12-10T03:46:07","guid":{"rendered":"https:\/\/www.fariplasmatech.com\/product\/single-chamber-pecvd-deposition-system\/"},"modified":"2025-12-10T03:46:07","modified_gmt":"2025-12-10T03:46:07","slug":"single-chamber-pecvd-deposition-system","status":"publish","type":"product","link":"https:\/\/www.fariplasmatech.com\/ko\/product\/single-chamber-pecvd-deposition-system\/","title":{"rendered":"Single-Chamber PECVD Deposition System"},"content":{"rendered":"","protected":false},"excerpt":{"rendered":"

Single-chamber PECVD system for low-temperature plasma-enhanced deposition of SiO2 and dielectric thin films. Optimized for high-quality, dense layers used in semiconductors, photovoltaics, and photonics.<\/p>\n","protected":false},"featured_media":365,"template":"","meta":{"inline_featured_image":false},"products":[30],"class_list":["post-279","product","type-product","status-publish","has-post-thumbnail","hentry","products-semiconductor-plasma-equipment"],"yoast_head":"\nSingle-Chamber PECVD Deposition System - Fari Plasma<\/title>\n<meta name=\"robots\" content=\"noindex, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<meta property=\"og:locale\" content=\"ko_KR\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Single-Chamber PECVD Deposition System - Fari Plasma\" \/>\n<meta property=\"og:description\" content=\"Single-chamber PECVD system for low-temperature plasma-enhanced deposition of SiO2 and dielectric thin films. Optimized for high-quality, dense layers used in semiconductors, photovoltaics, and photonics.\" \/>\n<meta property=\"og:url\" content=\"https:\/\/www.fariplasmatech.com\/ko\/product\/single-chamber-pecvd-deposition-system\/\" \/>\n<meta property=\"og:site_name\" content=\"Fari Plasma\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"WebPage\",\"@id\":\"https:\/\/www.fariplasmatech.com\/ko\/product\/single-chamber-pecvd-deposition-system\/\",\"url\":\"https:\/\/www.fariplasmatech.com\/ko\/product\/single-chamber-pecvd-deposition-system\/\",\"name\":\"Single-Chamber PECVD Deposition System - Fari Plasma\",\"isPartOf\":{\"@id\":\"https:\/\/www.fariplasmatech.com\/ko\/#website\"},\"primaryImageOfPage\":{\"@id\":\"https:\/\/www.fariplasmatech.com\/ko\/product\/single-chamber-pecvd-deposition-system\/#primaryimage\"},\"image\":{\"@id\":\"https:\/\/www.fariplasmatech.com\/ko\/product\/single-chamber-pecvd-deposition-system\/#primaryimage\"},\"thumbnailUrl\":\"https:\/\/www.fariplasmatech.com\/ko\/wp-content\/uploads\/2025\/12\/20250830100956800-scaled.png\",\"datePublished\":\"2025-12-10T03:46:07+00:00\",\"breadcrumb\":{\"@id\":\"https:\/\/www.fariplasmatech.com\/ko\/product\/single-chamber-pecvd-deposition-system\/#breadcrumb\"},\"inLanguage\":\"ko_KR\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\/\/www.fariplasmatech.com\/ko\/product\/single-chamber-pecvd-deposition-system\/\"]}]},{\"@type\":\"ImageObject\",\"inLanguage\":\"ko_KR\",\"@id\":\"https:\/\/www.fariplasmatech.com\/ko\/product\/single-chamber-pecvd-deposition-system\/#primaryimage\",\"url\":\"https:\/\/www.fariplasmatech.com\/ko\/wp-content\/uploads\/2025\/12\/20250830100956800-scaled.png\",\"contentUrl\":\"https:\/\/www.fariplasmatech.com\/ko\/wp-content\/uploads\/2025\/12\/20250830100956800-scaled.png\",\"width\":2560,\"height\":1956},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/www.fariplasmatech.com\/ko\/product\/single-chamber-pecvd-deposition-system\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"Home\",\"item\":\"https:\/\/www.fariplasmatech.com\/ko\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"Products\",\"item\":\"https:\/\/www.fariplasmatech.com\/ko\/product\/\"},{\"@type\":\"ListItem\",\"position\":3,\"name\":\"Single-Chamber PECVD Deposition System\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\/\/www.fariplasmatech.com\/ko\/#website\",\"url\":\"https:\/\/www.fariplasmatech.com\/ko\/\",\"name\":\"Fari Plasma\",\"description\":\"\",\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/www.fariplasmatech.com\/ko\/?s={search_term_string}\"},\"query-input\":{\"@type\":\"PropertyValueSpecification\",\"valueRequired\":true,\"valueName\":\"search_term_string\"}}],\"inLanguage\":\"ko_KR\"}]}<\/script>\n<!-- \/ Yoast SEO plugin. -->","yoast_head_json":{"title":"Single-Chamber PECVD Deposition System - Fari Plasma","robots":{"index":"noindex","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"og_locale":"ko_KR","og_type":"article","og_title":"Single-Chamber PECVD Deposition System - Fari Plasma","og_description":"Single-chamber PECVD system for low-temperature plasma-enhanced deposition of SiO2 and dielectric thin films. Optimized for high-quality, dense layers used in semiconductors, photovoltaics, and photonics.","og_url":"https:\/\/www.fariplasmatech.com\/ko\/product\/single-chamber-pecvd-deposition-system\/","og_site_name":"Fari Plasma","twitter_card":"summary_large_image","schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"WebPage","@id":"https:\/\/www.fariplasmatech.com\/ko\/product\/single-chamber-pecvd-deposition-system\/","url":"https:\/\/www.fariplasmatech.com\/ko\/product\/single-chamber-pecvd-deposition-system\/","name":"Single-Chamber PECVD Deposition System - Fari Plasma","isPartOf":{"@id":"https:\/\/www.fariplasmatech.com\/ko\/#website"},"primaryImageOfPage":{"@id":"https:\/\/www.fariplasmatech.com\/ko\/product\/single-chamber-pecvd-deposition-system\/#primaryimage"},"image":{"@id":"https:\/\/www.fariplasmatech.com\/ko\/product\/single-chamber-pecvd-deposition-system\/#primaryimage"},"thumbnailUrl":"https:\/\/www.fariplasmatech.com\/ko\/wp-content\/uploads\/2025\/12\/20250830100956800-scaled.png","datePublished":"2025-12-10T03:46:07+00:00","breadcrumb":{"@id":"https:\/\/www.fariplasmatech.com\/ko\/product\/single-chamber-pecvd-deposition-system\/#breadcrumb"},"inLanguage":"ko_KR","potentialAction":[{"@type":"ReadAction","target":["https:\/\/www.fariplasmatech.com\/ko\/product\/single-chamber-pecvd-deposition-system\/"]}]},{"@type":"ImageObject","inLanguage":"ko_KR","@id":"https:\/\/www.fariplasmatech.com\/ko\/product\/single-chamber-pecvd-deposition-system\/#primaryimage","url":"https:\/\/www.fariplasmatech.com\/ko\/wp-content\/uploads\/2025\/12\/20250830100956800-scaled.png","contentUrl":"https:\/\/www.fariplasmatech.com\/ko\/wp-content\/uploads\/2025\/12\/20250830100956800-scaled.png","width":2560,"height":1956},{"@type":"BreadcrumbList","@id":"https:\/\/www.fariplasmatech.com\/ko\/product\/single-chamber-pecvd-deposition-system\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"Home","item":"https:\/\/www.fariplasmatech.com\/ko\/"},{"@type":"ListItem","position":2,"name":"Products","item":"https:\/\/www.fariplasmatech.com\/ko\/product\/"},{"@type":"ListItem","position":3,"name":"Single-Chamber PECVD Deposition System"}]},{"@type":"WebSite","@id":"https:\/\/www.fariplasmatech.com\/ko\/#website","url":"https:\/\/www.fariplasmatech.com\/ko\/","name":"Fari Plasma","description":"","potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/www.fariplasmatech.com\/ko\/?s={search_term_string}"},"query-input":{"@type":"PropertyValueSpecification","valueRequired":true,"valueName":"search_term_string"}}],"inLanguage":"ko_KR"}]}},"_links":{"self":[{"href":"https:\/\/www.fariplasmatech.com\/ko\/wp-json\/wp\/v2\/product\/279","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.fariplasmatech.com\/ko\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.fariplasmatech.com\/ko\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.fariplasmatech.com\/ko\/wp-json\/wp\/v2\/media\/365"}],"wp:attachment":[{"href":"https:\/\/www.fariplasmatech.com\/ko\/wp-json\/wp\/v2\/media?parent=279"}],"wp:term":[{"taxonomy":"products","embeddable":true,"href":"https:\/\/www.fariplasmatech.com\/ko\/wp-json\/wp\/v2\/products?post=279"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}