Plasma Cleaners

RTR-60 Roll-to-Roll Vacuum Plasma Cleaner

The RTR-60 roll-to-roll vacuum plasma cleaner provides uniform, high-efficiency surface cleaning and activation for continuous production. Integrated PLC and touch-screen control enable safe, automated operation for various film and web materials.

  • Tubular electrode design ensures uniform discharge and consistent treatment.
  • Integrated PLC + touch screen for simple operation and multi-level safety.
  • High-efficiency, stable performance designed for large-scale continuous production.

Tech Specs

Product Name Vacuum Plasma Cleaner
Model RTR-60
Control System PLC + Touch Screen
Plasma Power Frequency 13.56 MHz
Power Supply AC 380V (±10V)
Plasma Generator Power 500 W (adjustable)
Gas Flow 0-200 mL/min (two gas lines adjustable)
Gas Channels 2 channels with mass flow controllers
Process Control Automatic and manual modes
Chamber Internal Size (mm) 385 × 385 × 455
Overall Dimensions (mm) 870 × 740 × 1540 (L × W × H)
Max Web Width 200 mm
Max Roll Diameter Ø200 mm
Roll Speed 1-10 rpm
Vacuum Level 30-100 Pa

Key Features

  • Uniform Tubular Electrode Discharge

    The machine uses a tubular electrode structure that delivers consistent plasma discharge across varying material shapes, ensuring uniform surface treatment and minimizing process variation for roll materials.

  • Integrated PLC and Touch Control

    A PLC with a touch-screen interface provides intuitive, centralized control of process parameters, enabling easy recipe management, safe operation, and quick switching between automated and manual modes.

  • Adjustable RF Power Output

    The plasma generator offers a 500 W adjustable power range and 13.56 MHz frequency, allowing precise tuning of plasma intensity to match different substrates and treatment requirements for optimal results.

  • Dual Gas Flow Management

    Two independent gas channels with mass flow control support mixed gas recipes and precise flow adjustments (0-200 mL/min), enabling tailored chemistries for activation, cleaning, or surface modification.

  • Designed for Continuous Production

    Compact roll-to-roll architecture with controlled web handling supports continuous, large-scale processing of films and webs up to 200 mm wide, improving throughput while maintaining consistent treatment quality.

  • Robust Vacuum and Process Stability

    The system operates in a controlled vacuum range (30–100 Pa) to stabilize plasma conditions and reduce contamination, delivering reproducible surface activation and reliable performance for production environments.

Plasma Cleaning Process

  • Plasma Generation

    Process gas is energized and converted into a reactive plasma containing ions, electrons, and radicals.

  • Plasma–Surface Interaction

    High-energy plasma species reach the material surface and interact with contaminants at the molecular level.

  • Chemical Reaction

    Reactive ions and radicals break down organic residues and surface contaminants through controlled chemical reactions.

  • Volatilization

    The reaction products are converted into volatile compounds and enter the gas phase.

  • Removal from Surface

    Gaseous by-products desorb from the surface and are evacuated, leaving a clean, activated material surface.