Plasma Cleaners

Benchtop Plasma Cleaner (5L Compact Vacuum)

The GD-5 is Fari Plasma's smallest vacuum unit — a benchtop plasma cleaner built for lab benches and small-batch runs. A 300W adjustable generator, PLC touchscreen, dual gas channels, and a 316 stainless steel/aluminum chamber operate inside a 5L volume, using the same vacuum plasma treatment mechanism found on larger production systems.

  • Precision cleaning for small batches
  • PLC + touch screen — easy operation
  • Customizable 316SS and aluminum chamber

Tech Specs

Product Name Vacuum Plasma Cleaner
Model GD-5
Control System PLC + Touch Screen
Plasma Frequency 40 kHz / 13.56 MHz
Power Supply AC 220V (±10V)
Generator Power 300 W (adjustable)
Gas Lines 2-channel float flow control
Process Control Automatic / Manual
Chamber Inner Size Φ150 × 280 mm
Load Area 120 × 230 mm (W × L)
External Dimensions 560 × 550 × 400 mm (L × D × H)
Chamber Volume 5 L
Vacuum Level 10–30 Pa
Compatible Gases Argon, Oxygen, Nitrogen, Air, H2+N2 (mixed)

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5L Format

Chamber Size and What It Means

A 120 × 230 mm load area suits coupons, small parts, and lab samples rather than full production trays, and reaching 10–30 Pa needs pump-down time before each cycle.

  • Load area fits coupons, small parts, and lab samples.
  • Pump-down time sets throughput, not the plasma step.
  • Larger parts or continuous batches need a bigger chamber.
Included

What Ships With the GD-5

Gas lines, needle valves, and flow meters are integrated into the chamber as standard. A vacuum pump is confirmed separately during technical evaluation to match your target pressure and space constraints.

  • Integrated gas lines, needle valves, flow meters
  • 1-year warranty, lifetime technical support
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Typical GD-5 Processes

Oxygen plasma processing suits photoresist residue and biomedical substrate cleaning, and the O2 plasma cleaner variant runs oxygen-only processing on the same footprint. Exact cycle time depends on pump-down speed and contamination level, so technical evaluation confirms the process settings for your material.

  • Oxygen Plasma

    Photoresist residue and biomedical substrate cleaning, run near the low end of the 10–30 Pa range for gentle, uniform contact.

  • Argon Plasma

    Metal and glass surfaces ahead of bonding, using higher generator output for a stronger clean.

  • Nitrogen Mixes

    Nitrogen or H2+N2 mixes for activation on polymer samples where oxidation must stay limited.

GD-5 vs basic

Compared to Basic Entry-Level Benchtop Units

Basic units typically run a single rotameter, a plain aluminum chamber, and keypad control storing one recipe.

The GD-5 runs two independent gas channels with needle valves and float meters, a corrosion-resistant 316SS/aluminum chamber, and PLC-driven touchscreen control — the same chamber construction standard used across plasma cleaning chamber systems.

Plasma cleaners overcome this challenge by using high-speed, high-energy plasma to chemically and physically modify the surface. This process optimizes the material's surface, creating an active layer that is essential for successful subsequent operations like printing, bonding, and coating.

Scaling Beyond 5L

For higher power density rather than more volume, the high-power vacuum plasma treatment line adds generator output at similar chamber scale. For continuous-line work, an inline plasma cleaner moves parts through treatment without reloading a chamber, and compact inline plasma surface activation scales that down to a smaller integrated cell — trade-offs weighed in inline plasma cleaner pros and cons.

ModelChamber VolumeLoad AreaBest-Fit Batch Size
GD-5 (this unit)5 L120 × 230 mmLab samples, coupons, single small parts
Lab vacuum systemLarger chamber—Bigger samples, expanded lab throughput
125L batch system125 L—Multiple parts per load, batch processing
600L system600 L—High-volume production batches
5L Format

Where the 5L Format Fits

Each GD-5 is inspected, calibrated, and test-run before shipment, with power output, gas flow, and plasma parameters recorded by serial number for traceability. Request GD-5 pricing with your sample material and load size, or browse the full vacuum plasma cleaners range for a different chamber size.

Plastics

Coupon testing for adhesion promotion before committing to production tooling.

Semiconductors

Lead frame or wafer-adjacent sample cleaning where load size stays under 120 × 230 mm.

Medical Devices

Prototype and pilot-batch cleaning ahead of qualifying a production-scale chamber.